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       SEMINAR OF THE LABORATORY FOR COMPUTER DESIGN OF MATERIALS
        Institute for Computational Sciences and Informatics
		CSI 929  (http://science.gmu.edu/physics)
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    Ion Implantation: A Computational Example, and Coupling  Plasma
                 Codes to Solid Surface  Evolution Codes

			    John Guillory
	   Institute for Computational Sciences and Informatics 
			George Mason University 

One of many examples of plasma processing of solids involves the acceleration
of plasma ions into the solid to modify the surface and near-surface properties
of the solid.  As a  specific set of cases, we will consider modification of a
titanium cathode by ions of an evolving nitrogen plasma, at pressures 10^-2,
10^-3, and 10^-4 Torr, when a large (20kV) repeating negative voltage is
applied to the cathode.  The PIC-MC code PDP1 is used to evolve the plasma and
its sheath boundary layer, and the TRIM ion deposition code is used to evolve
the near-surface  region of the solid cathode.  The example chosen is a 1-D
problem;  2D and 3D simulations of such processing will be discussed in more
general terms.

                         Monday , September 23, 1996
                                  5:00 pm
                          Room 206, Science & Tech. I
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